JPH02103288U - - Google Patents

Info

Publication number
JPH02103288U
JPH02103288U JP1185989U JP1185989U JPH02103288U JP H02103288 U JPH02103288 U JP H02103288U JP 1185989 U JP1185989 U JP 1185989U JP 1185989 U JP1185989 U JP 1185989U JP H02103288 U JPH02103288 U JP H02103288U
Authority
JP
Japan
Prior art keywords
detector
article
contamination
articles
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1185989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1185989U priority Critical patent/JPH02103288U/ja
Publication of JPH02103288U publication Critical patent/JPH02103288U/ja
Pending legal-status Critical Current

Links

JP1185989U 1989-02-03 1989-02-03 Pending JPH02103288U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1185989U JPH02103288U (en]) 1989-02-03 1989-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1185989U JPH02103288U (en]) 1989-02-03 1989-02-03

Publications (1)

Publication Number Publication Date
JPH02103288U true JPH02103288U (en]) 1990-08-16

Family

ID=31220782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1185989U Pending JPH02103288U (en]) 1989-02-03 1989-02-03

Country Status (1)

Country Link
JP (1) JPH02103288U (en])

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